Professor Paul W May

B.Sc., Ph.D.(Bristol), C.Chem., M.R.S.C.

  • BS8 1TS

1991 …2021

Research output per year

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Research Output

1993

Hardness testing of Diamond and Diamond-like Carbon Films in "Diamond Materials"

Everitt, NM., Cock, AM., May, PW., Rosser, KN. & Ashfold, MNR., 1993, Proc. 3rd Int. Symp. Diamond Mater. (eds. J.P. Dismukes and K.V. Ravi) . Electrochemical Society, Vol. 93-17. p. 955 - 961 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Ion energy distributions and sidewall profiles in reactive ion etching

May, PW., Field, D., Klemperer, DF. & Song, YP., 1993, Plasma processing of materials. Pouch, JJ. & Alterovitz, SA. (eds.). Trans Tech Publications Inc, p. 121 - 132 11 p.

Research output: Chapter in Book/Report/Conference proceedingChapter in a book

Ion energy distributions at the anode of a reactive ion etcher

Dickenson, AC., Field, D., Klemperer, DF., May, PW., Johnson, PC. & Pitts, RA., 1993, Unknown. Vol. 730.

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Ion energy distributions at the anode of a reactive ion etcher

Dickenson, AC., Field, D., Klemperer, DF. & May, PW., 1993, Unknown. Vol. 4. p. 1278 - 1283 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Monte Carlo simulations of electron distributions in the sheath region in reactive ion etching plasmas

May, PW., Klemperer, DF. & Field, D., 1993, In : Journal of Applied Physics. 73, p. 1634 - 1643 9 p.

Research output: Contribution to journalArticle (Academic Journal)

20 Citations (Scopus)

Preparation of CVD diamond wires, fibres and tubes

May, PW., Rego, CA., Thomas, RG., Ashfold, MNR., Rosser, KN., Partridge, PG. & Everitt, NM., 1993, Proc. 3rd Int. Symp. Diamond Mater. (eds. J.P. Dismukes and K.V. Ravi) . Electrochemical Society

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Simulation of sidewall profiles in reactive ion etching

Hedgecock, IM., May, PW., Field, D. & Klemperer, DF., 1993, Unknown. Vol. 733.

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Simulations of sidewall profiles in reactive ion etching

May, PW., Field, D. & Klemperer, DF., 1993, In : Journal of Physics D: Applied Physics. 26, p. 598 - 606 8 p.

Research output: Contribution to journalArticle (Academic Journal)

The modelling of sidewall profiles produced during reactive ion etching

Hedgecock, IM., May, PW., Field, D. & Klemperer, DF., 1993, Unknown. Vol. 3. p. 921 - 926 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

1992

Modelling radio frequency discharges: effects of collisions upon ion and neutral particle energy distributions

Field, D., Klemperer, DF. & May, PW., 1992, In : Journal of Applied Physics. 71, p. 3721 - 3730 9 p.

Research output: Contribution to journalArticle (Academic Journal)

49 Citations (Scopus)
1991

Ion energy and angular distributions at the anode of RF etch reactors

May, PW., Field, D., Klemperer, DF. & Song, YP., 1991, In : Journal of Physics Condensed Matter. 3, p. 257 - 264 7 p.

Research output: Contribution to journalArticle (Academic Journal)

1 Citation (Scopus)

Ion energy distributions in RF discharges

Field, D., Klemperer, DF., May, PW. & Song, YP., 1991, In : Journal of Applied Physics. 70, p. 82 - 92 10 p.

Research output: Contribution to journalArticle (Academic Journal)

49 Citations (Scopus)

RF plasmas: Ion energies and modelling reactive ion etching

Field, D., May, PW., Klemperer, DF. & Song, YP., 1991, Plasma Chemistry Sources and Diagnostics, Colloquium Digest. Institution of Engineering and Technology (IET), Vol. 090. p. 1 - 3 2 p.

Research output: Chapter in Book/Report/Conference proceedingChapter in a book