Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Project Details

StatusFinished
Effective start/end date1/07/1321/12/18

Research Output

  • 10 Article (Academic Journal)
  • 2 Review article (Academic Journal)

Nitrogen in Diamond

Ashfold, M. N. R., Goss, J. P., Green, B. L., May, P. W., Newton, M. E. & Peaker, C. V., 24 Jun 2020, In : Chemical Reviews. 120, p. 5745-5794 50 p., 12.

Research output: Contribution to journalReview article (Academic Journal)

  • Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition

    Mahoney, E. J. D., Mushtaq, S., Ashfold, M. N. R. & Mankelevich, Y. A., 4 Apr 2019, In : Journal of Physical Chemistry A. 123, 13, p. 2544-2558 15 p.

    Research output: Contribution to journalArticle (Academic Journal)

    Open Access
    File
  • 2 Citations (Scopus)
    48 Downloads (Pure)

    Imaging and Modeling the Optical Emission from CH Radicals in Microwave Activated C/H Plasmas

    Mahoney, E. J. D., Rodriguez, B. J., Mushtaq, S., Truscott, B. S., Ashfold, M. N. R. & Mankelevich, Y. A., 24 Oct 2019, In : Journal of Physical Chemistry A. 123, p. 9966-9977 12 p.

    Research output: Contribution to journalArticle (Academic Journal)