Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Project Details

StatusFinished
Effective start/end date1/07/1321/12/18

Research Output

  • 11 Article (Academic Journal)
  • 2 Review article (Academic Journal)

Diamond chemical vapor deposition using a zero-total gas flow environment

Croot, A., Mahoney, E. J. D., Dominguez Andrade, H., Ashfold, M. N. R. & Fox, N. A., 22 Jul 2020, In : Diamond and Related Materials. 109, 7 p., 108011.

Research output: Contribution to journalArticle (Academic Journal)

  • Nitrogen in Diamond

    Ashfold, M. N. R., Goss, J. P., Green, B. L., May, P. W., Newton, M. E. & Peaker, C. V., 24 Jun 2020, In : Chemical Reviews. 120, p. 5745-5794 50 p., 12.

    Research output: Contribution to journalReview article (Academic Journal)

  • Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition

    Mahoney, E. J. D., Mushtaq, S., Ashfold, M. N. R. & Mankelevich, Y. A., 4 Apr 2019, In : Journal of Physical Chemistry A. 123, 13, p. 2544-2558 15 p.

    Research output: Contribution to journalArticle (Academic Journal)

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  • 3 Citations (Scopus)
    64 Downloads (Pure)