A study of the design process of a micro-accelerometer

T Kiriyama, S Yoshimura, T Suga, T Ito, SC Burgess, DF Moore, J Daniel, H Klaubert

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionA study of the design process of a micro-accelerometer
Original languageEnglish
Title of host publicationRACE International Symposium, Tokyo
Pages117 - 128
Publication statusPublished - Nov 1996

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