A transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching

Y Atici, D Cherns

Research output: Contribution to journalArticle (Academic Journal)peer-review

2 Citations (Scopus)
Translated title of the contributionA transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching
Original languageEnglish
Pages (from-to)262 - 268
JournalJournal of Crystal Growth
Volume154
Publication statusPublished - 1995

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