Translated title of the contribution | A transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching |
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Original language | English |
Pages (from-to) | 262 - 268 |
Journal | Journal of Crystal Growth |
Volume | 154 |
Publication status | Published - 1995 |
A transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching
Y Atici, D Cherns
Research output: Contribution to journal › Article (Academic Journal) › peer-review
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