A transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching

Y Atici, D Cherns

Research output: Contribution to journal › Article (Academic Journal) › peer-review

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Translated title of the contribution	A transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching
Original language	English
Pages (from-to)	262 - 268
Journal	Journal of Crystal Growth
Volume	154
Publication status	Published - 1995

Cite this

@article{b488b89dfd4540ca919151cce6ccbdac,

title = "A transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching",

author = "Y Atici and D Cherns",

year = "1995",

language = "English",

volume = "154",

pages = "262 -- 268",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "North-Holland Publishing Company",

}