A Waveguide Integrated GaN Distributed Bragg Reflector Cavity Using Low Cost Nanolithography

Simeng Jia; E. D. Le Boulbar; Krishna Coimbatore Balram; Jon R Pugh; T Wang; D. W.E. Allsopp; P. A. Shields; Martin J Cryan

doi:10.1049/mnl.2019.0366

A Waveguide Integrated GaN Distributed Bragg Reflector Cavity Using Low Cost Nanolithography

Simeng Jia, E. D. Le Boulbar, Krishna Coimbatore Balram, Jon R Pugh, T Wang, D. W.E. Allsopp, P. A. Shields, Martin J Cryan

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Abstract

In this paper, we present the design, fabrication and measurement of gallium nitride (GaN) Distributed Bragg Reflector (DBR) cavities integrated with input and output grating couplers. The devices are fabricated using a new, low cost nanolithography technique: Displacement Talbot Lithography (DTL) combined with Direct Laser Writing (DLW) lithography. The finite difference time-domain (FDTD) method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.

Original language	English
Number of pages	7
Journal	Nano-Micro Letters
Volume	14
Issue number	13
Early online date	11 Nov 2019
DOIs	https://doi.org/10.1049/mnl.2019.0366
Publication status	Published - 20 Nov 2019

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title = "A Waveguide Integrated GaN Distributed Bragg Reflector Cavity Using Low Cost Nanolithography",

abstract = "In this paper, we present the design, fabrication and measurement of gallium nitride (GaN) Distributed Bragg Reflector (DBR) cavities integrated with input and output grating couplers. The devices are fabricated using a new, low cost nanolithography technique: Displacement Talbot Lithography (DTL) combined with Direct Laser Writing (DLW) lithography. The finite difference time-domain (FDTD) method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.",

author = "Simeng Jia and {Le Boulbar}, {E. D.} and {Coimbatore Balram}, Krishna and Pugh, {Jon R} and T Wang and Allsopp, {D. W.E.} and Shields, {P. A.} and Cryan, {Martin J}",

year = "2019",

month = nov,

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doi = "10.1049/mnl.2019.0366",

language = "English",

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T1 - A Waveguide Integrated GaN Distributed Bragg Reflector Cavity Using Low Cost Nanolithography

AU - Jia, Simeng

AU - Le Boulbar, E. D.

AU - Coimbatore Balram, Krishna

AU - Pugh, Jon R

AU - Wang, T

AU - Allsopp, D. W.E.

AU - Shields, P. A.

AU - Cryan, Martin J

PY - 2019/11/20

Y1 - 2019/11/20

N2 - In this paper, we present the design, fabrication and measurement of gallium nitride (GaN) Distributed Bragg Reflector (DBR) cavities integrated with input and output grating couplers. The devices are fabricated using a new, low cost nanolithography technique: Displacement Talbot Lithography (DTL) combined with Direct Laser Writing (DLW) lithography. The finite difference time-domain (FDTD) method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.

AB - In this paper, we present the design, fabrication and measurement of gallium nitride (GaN) Distributed Bragg Reflector (DBR) cavities integrated with input and output grating couplers. The devices are fabricated using a new, low cost nanolithography technique: Displacement Talbot Lithography (DTL) combined with Direct Laser Writing (DLW) lithography. The finite difference time-domain (FDTD) method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.

U2 - 10.1049/mnl.2019.0366

DO - 10.1049/mnl.2019.0366

M3 - Article (Academic Journal)

VL - 14

JO - Nano-Micro Letters

JF - Nano-Micro Letters

SN - 2311-6706

IS - 13

ER -

A Waveguide Integrated GaN Distributed Bragg Reflector Cavity Using Low Cost Nanolithography

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