Translated title of the contribution | Adhesive bonding in microelectronics and photonics |
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Original language | English |
Pages (from-to) | 6227 - 6262 |
Number of pages | 36 |
Journal | Journal of Applied Physics |
Volume | 91 (10) |
DOIs | |
Publication status | Published - May 2002 |
Adhesive bonding in microelectronics and photonics
BG Yacobi, S Martin, K Davis, AJ Hudson, M Hubert
Research output: Contribution to journal › Article (Academic Journal) › peer-review
115
Citations
(Scopus)