An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications

Sunil Rana*, Pedro M. Ortiz, Alun J. Harris, James S. Burdess, Calum J. McNeil

*Corresponding author for this work

Research output: Contribution to journalArticle (Academic Journal)peer-review

3 Citations (Scopus)

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