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An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications
Sunil Rana*, Pedro M. Ortiz, Alun J. Harris, James S. Burdess, Calum J. McNeil
*Corresponding author for this work
Research output: Contribution to journal › Article (Academic Journal) › peer-review
1
Citation
(Scopus)