An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

A. Farrokh Payam, F. Arab Hassani, M. Fathipour

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Abstract

This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

Original languageEnglish
Title of host publication2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008
Place of PublicationNis, Serbia & Montenegro
Pages341-344
Number of pages4
DOIs
Publication statusPublished - 2008
Event26th International Conference on Microelectronics, MIEL 2008 - Nis, Serbia
Duration: 11 May 200814 May 2008

Publication series

Name"2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"

Conference

Conference26th International Conference on Microelectronics, MIEL 2008
CountrySerbia
CityNis
Period11/05/0814/05/08

Bibliographical note

Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.

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