An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

A. Farrokh Payam; F. Arab Hassani; M. Fathipour

doi:10.1109/ICMEL.2008.4559291

An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

A. Farrokh Payam, F. Arab Hassani, M. Fathipour

Department of Electrical & Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Abstract

This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

Original language	English
Title of host publication	2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008
Place of Publication	Nis, Serbia & Montenegro
Pages	341-344
Number of pages	4
DOIs	https://doi.org/10.1109/ICMEL.2008.4559291
Publication status	Published - 2008
Event	26th International Conference on Microelectronics, MIEL 2008 - Nis, Serbia Duration: 11 May 2008 → 14 May 2008

Publication series

Name	"2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"

Conference

Conference	26th International Conference on Microelectronics, MIEL 2008
Country/Territory	Serbia
City	Nis
Period	11/05/08 → 14/05/08

Bibliographical note

Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.

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10.1109/ICMEL.2008.4559291

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Payam, A. F., Hassani, F. A., & Fathipour, M. (2008). An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. In 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008 (pp. 341-344). [4559291] ("2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008").. https://doi.org/10.1109/ICMEL.2008.4559291

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abstract = "This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.",

author = "Payam, {A. Farrokh} and Hassani, {F. Arab} and M. Fathipour",

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Payam, AF, Hassani, FA & Fathipour, M 2008, An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. in 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008., 4559291, "2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008", Nis, Serbia & Montenegro, pp. 341-344, 26th International Conference on Microelectronics, MIEL 2008, Nis, Serbia, 11/05/08. https://doi.org/10.1109/ICMEL.2008.4559291

An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. / Payam, A. Farrokh; Hassani, F. Arab; Fathipour, M.

2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008. Nis, Serbia & Montenegro, 2008. p. 341-344 4559291 ("2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008").

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

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N2 - This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

AB - This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

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T3 - "2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"

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BT - 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008

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T2 - 26th International Conference on Microelectronics, MIEL 2008

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Payam AF, Hassani FA, Fathipour M. An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. In 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008. Nis, Serbia & Montenegro. 2008. p. 341-344. 4559291. ("2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"). https://doi.org/10.1109/ICMEL.2008.4559291

An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

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