An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

A. Farrokh Payam; F. Arab Hassani; M. Fathipour

doi:10.1109/ICMEL.2008.4559291

An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

A. Farrokh Payam, F. Arab Hassani, M. Fathipour

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Abstract

This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

Original language	English
Title of host publication	2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008
Place of Publication	Nis, Serbia & Montenegro
Pages	341-344
Number of pages	4
DOIs	https://doi.org/10.1109/ICMEL.2008.4559291
Publication status	Published - 2008
Event	26th International Conference on Microelectronics, MIEL 2008 - Nis, Serbia Duration: 11 May 2008 → 14 May 2008

Publication series

Name	"2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"

Conference

Conference	26th International Conference on Microelectronics, MIEL 2008
Country/Territory	Serbia
City	Nis
Period	11/05/08 → 14/05/08

Bibliographical note

Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.

Research Groups and Themes

Photonics and Quantum

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10.1109/ICMEL.2008.4559291

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Payam, A. F., Hassani, F. A., & Fathipour, M. (2008). An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. In 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008 (pp. 341-344). Article 4559291 ("2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008").. https://doi.org/10.1109/ICMEL.2008.4559291

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title = "An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory",

abstract = "This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.",

author = "Payam, \{A. Farrokh\} and Hassani, \{F. Arab\} and M. Fathipour",

year = "2008",

doi = "10.1109/ICMEL.2008.4559291",

language = "English",

isbn = "9781424418824",

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booktitle = "2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008",

}

Payam, AF, Hassani, FA & Fathipour, M 2008, An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. in 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008., 4559291, "2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008", Nis, Serbia & Montenegro, pp. 341-344, 26th International Conference on Microelectronics, MIEL 2008, Nis, Serbia, 11/05/08. https://doi.org/10.1109/ICMEL.2008.4559291

An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. / Payam, A. Farrokh; Hassani, F. Arab; Fathipour, M.
2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008. Nis, Serbia & Montenegro, 2008. p. 341-344 4559291 ("2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008").

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

AU - Payam, A. Farrokh

AU - Hassani, F. Arab

AU - Fathipour, M.

PY - 2008

Y1 - 2008

N2 - This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

AB - This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

UR - https://www.scopus.com/pages/publications/51749100438

U2 - 10.1109/ICMEL.2008.4559291

DO - 10.1109/ICMEL.2008.4559291

M3 - Conference Contribution (Conference Proceeding)

AN - SCOPUS:51749100438

SN - 9781424418824

T3 - "2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"

SP - 341

EP - 344

BT - 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008

CY - Nis, Serbia & Montenegro

T2 - 26th International Conference on Microelectronics, MIEL 2008

Y2 - 11 May 2008 through 14 May 2008

ER -

Payam AF, Hassani FA, Fathipour M. An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory. In 2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008. Nis, Serbia & Montenegro. 2008. p. 341-344. 4559291. ("2008 26th International Conference on Microelectronics, Proceedings, MIEL 2008"). doi: 10.1109/ICMEL.2008.4559291

An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

Abstract

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Bibliographical note

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