An optimized nano-positioning stage for Bristol’s Transverse Dynamic Force Microscope

G De Silva, Stuart Burgess, Toshiaki Hatano, Said Khan, Kaiqiang Zhang, Thang Nguyen Tien, Guido Herrmann, C Edwards, Mervyn Miles

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

4 Citations (Scopus)
257 Downloads (Pure)

Abstract

This paper presents the design process for the optimisation of a nano-precision actuation stage for a Transverse Dynamic Force Microscope (TDFM). A TDFM is an advanced type of Atomic Force microscope (AFM) that does not contact the specimen and therefore has potential for increased accuracy and decreased damage to the specimen. The nano-precision stage actuates in a horizontal plane within a region of 1m1m and with a resolution of 0.3 nm. The non-contact TDFM has been developed at Bristol University for the precise topographical mapping of biological and non-biological specimens in ambient conditions. The design objective was to maximise positional accuracy during high speed actuation. This is achieved by minimising vibrations and distortion of the stage during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection, as well optimisation of the anchoring system. The design was subject to constraints including an in-plane stiffness constraint, space constraints and design features relating to the laser interferometry position sensing system and subsequent controller design.
Original languageEnglish
Title of host publication7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference
Subtitle of host publicationLoughborough, United Kingdom, 5-8 September 2016
PublisherAmsterdam:Elsevier
Pages120-126
Number of pages7
DOIs
Publication statusPublished - 2016
Event7th IFAC Symposium on Mechatronic Systems - Loughborough University, Loughborough, United Kingdom
Duration: 5 Sep 20168 Sep 2016

Publication series

NameIFAC PapersOnline
PublisherElseveier
ISSN (Print)2405-8963

Conference

Conference7th IFAC Symposium on Mechatronic Systems
CountryUnited Kingdom
CityLoughborough
Period5/09/168/09/16

Keywords

  • x-y Stage
  • Force Microscope
  • Micro-/Nanosystems
  • Multi-Disciplinary Modelling
  • Motion Control

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