Analysis and optimisation of MEMS electrostatic on-chip power supply for self-powering of slow-moving sensors

PD Mitcheson, BH Stark, P Miao, EM Yeatman, AS Holmes, TC Green

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Abstract

This paper analyses the performance of on-chip motion-driven power generators designed to eliminate wire connections and batteries in embedded sensors. Micro-generators capable of generating enough energy to power sensors have previously been reported. These require high frequency mechanical vibrations to set up the necessary resonance. However, many applications compatible with a human environment do not vibrate; they move slowly and irregularly, and therefore new methods of optimising the power generation are required. Analysis and simulation models to support this are presented for large-amplitude, low-frequency and irregular motion. In order for the generator to continuously achieve the highest possible power generation, the electrostatic force should be constantly reoptimised on-line to account for the actual operating conditions.
Translated title of the contributionAnalysis and optimisation of MEMS electrostatic on-chip power supply for self-powering of slow-moving sensors
Original languageEnglish
Title of host publication17th European Conference on Sensors and Actuators (Eurosensors XVII, 2003), Guimarães, Portugal, 21-24 September
Pages48 - 51
Number of pages4
Volume1
Publication statusPublished - Sep 2003

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