Analysis of grain-boundary structure in Al-Cu interconnects

DP Field, JE Sanchez, PR Besser, DJ Dingley

Research output: Contribution to journal › Article (Academic Journal) › peer-review

32 Citations (Scopus)

Translated title of the contribution	Analysis of grain-boundary structure in Al-Cu interconnects
Original language	English
Pages (from-to)	2383 - 2392
Journal	Journal of Applied Physics
Volume	82
Publication status	Published - 1997

Handle.net

@article{9f6952d2d76544d586b0df82dc2a5c1c,

title = "Analysis of grain-boundary structure in Al-Cu interconnects",

author = "DP Field and JE Sanchez and PR Besser and DJ Dingley",

year = "1997",

language = "English",

volume = "82",

pages = "2383 -- 2392",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics (AIP)",

}