Analytical Compact Model in Verilog-A for Electrostatically Actuated Ohmic Switches

Antonios Bazigos, Christopher L. Ayala, Montserrat Fernandez-Bolaños, Yu Pu, Daniel Grogg, Christoph Hagleitner, Sunil Rana, Tyson Tian Qin, Dinesh Pamunuwa, Adrian M. Ionescu

Research output: Contribution to journalArticle (Academic Journal)peer-review

15 Citations (Scopus)


Nowadays, electronics face a challenge regarding the power consumption of integrated circuits (ICs). There is a need for new devices that can provide improved switching capabilities. The downscaled electrostatically actuated ohmic switch, as a (re)emerging device, is a promising candidate to meet this need. To bring such a device seamlessly into IC design, it must be accompanied by an accurate, fast and robust analytical compact model. The development and the main characteristics of such a model are described within this paper. Extensive numerical simulations and measurements have been used to validate the model.
Original languageEnglish
Pages (from-to)2186-2194
Number of pages9
JournalIEEE Transactions on Electron Devices
Issue number6
Publication statusPublished - 1 Jun 2014

Structured keywords

  • Photonics and Quantum


  • electronic engineering computing
  • electrostatic actuators
  • hardware description languages
  • integrated circuit design
  • low-power electronics
  • microswitches
  • numerical analysis
  • power consumption
  • IC design
  • Verilog-A
  • analytical compact model
  • electrostatically actuated ohmic switches
  • integrated circuits
  • numerical simulations
  • switching capabilities
  • Analytical models
  • Computational modeling
  • Contacts
  • Force
  • Integrated circuit modeling
  • Logic gates
  • Numerical models
  • Cantilever
  • MEM
  • NEM
  • Verilog-A.
  • compact model
  • electrostatic actuation
  • ohmic switch
  • relay
  • switch


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