Atomically-engineered epitaxial anatase TiO2 metal-semiconductor field-effect transistors

Brian Kim, Makoto Minohara, Yasuyuki Hikita, Christopher Bell, Harold Y. Hwang

Research output: Contribution to journalArticle (Academic Journal)peer-review

5 Citations (Scopus)
349 Downloads (Pure)


Anatase TiO2 is a promising material for a vast array of electronic, energy, and environmental applications, including photocatalysis, photovoltaics, and sensors. A key requirement for these applications is the ability to modulate its electrical properties without dominant dopant scattering and while maintaining high carrier mobility. Here, we demonstrate the room temperature field-effect modulation of the conducting epitaxial interface between anatase TiO2 and LaAlO3 (001), which arises for LaO-terminated LaAlO3, while the AlO2-terminated interface is insulating. This approach, together with the metal-semiconductor field-effect transistor geometry, naturally bypasses the gate/channel interface traps, resulting in a high field-effect mobility μFE of 3.14 cm2 (V s)−1 approaching 98% of the corresponding Hall mobility μHall μHall. Accordingly, the channel conductivity is modulated over 6 orders of magnitude over a gate voltage range of ∼4 V.
Original languageEnglish
Article number133506
Number of pages4
JournalApplied Physics Letters
Issue number13
Early online date29 Mar 2018
Publication statusPublished - Mar 2018


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