Bringing real-time traceability to high-speed atomic force microscopy

Edward Heaps, Andrew Yacoot*, Herve Dongmo, Loren Picco, Oliver D Payton, Freddie Russell-Pavier, Petr Klapetek

*Corresponding author for this work

Research output: Contribution to journalArticle (Academic Journal)peer-review

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Abstract

In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short-range video rate images and large-area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.
Original languageEnglish
Number of pages11
JournalMeasurement Science and Technology
Volume31
Issue number7
DOIs
Publication statusPublished - 27 Apr 2020

Keywords

  • AFM
  • metrology

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