Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

Fang Ben; James Fernando; Jun-Yu Ou; Cécilia Dupré; Eric Ollier; Faezeh Arab Hassani; Hiroshi Mizuta; Yoshishige Tsuchiya

doi:10.1016/j.mne.2023.100212

Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

Fang Ben, James Fernando, Jun-Yu Ou, Cécilia Dupré, Eric Ollier, Faezeh Arab Hassani, Hiroshi Mizuta, Yoshishige Tsuchiya

Research output: Contribution to journal › Article (Academic Journal) › peer-review

Abstract

This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.

Original language	English
Article number	100212
Journal	Micro and Nano Engineering
Volume	19
DOIs	https://doi.org/10.1016/j.mne.2023.100212
Publication status	Published - 19 Jun 2023

Bibliographical note

Funding Information:
This work was partially supported by the EU FP7-ICT project NEMSIC [grant number 224525 ] and the CHIST-ERA grant NOEMIA [CHIST-ERA-21-NOEMS-004] by the Engineering and Physical Sciences Research Council [grant number EP/X03495X/1 ].

Publisher Copyright:
© 2023

Structured keywords

Photonics and Quantum

Keywords

Nanoelectromechanical systems
Nonlinear resonance
Mixing measurements
Duffing oscillator equation

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https://www.sciencedirect.com/science/article/pii/S2590007223000424

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@article{5171fc3342ea449a83f6d0a9022bebe7,

title = "Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators",

abstract = "This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.",

keywords = "Nanoelectromechanical systems, Nonlinear resonance, Mixing measurements, Duffing oscillator equation",

author = "Fang Ben and James Fernando and Jun-Yu Ou and C{\'e}cilia Dupr{\'e} and Eric Ollier and Hassani, {Faezeh Arab} and Hiroshi Mizuta and Yoshishige Tsuchiya",

note = "Funding Information: This work was partially supported by the EU FP7-ICT project NEMSIC [grant number 224525 ] and the CHIST-ERA grant NOEMIA [CHIST-ERA-21-NOEMS-004] by the Engineering and Physical Sciences Research Council [grant number EP/X03495X/1 ]. Publisher Copyright: {\textcopyright} 2023",

year = "2023",

month = jun,

day = "19",

doi = "10.1016/j.mne.2023.100212",

language = "English",

volume = "19",

journal = "Micro and Nano Engineering",

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TY - JOUR

T1 - Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

AU - Ben, Fang

AU - Fernando, James

AU - Ou, Jun-Yu

AU - Dupré, Cécilia

AU - Ollier, Eric

AU - Hassani, Faezeh Arab

AU - Mizuta, Hiroshi

AU - Tsuchiya, Yoshishige

N1 - Funding Information: This work was partially supported by the EU FP7-ICT project NEMSIC [grant number 224525 ] and the CHIST-ERA grant NOEMIA [CHIST-ERA-21-NOEMS-004] by the Engineering and Physical Sciences Research Council [grant number EP/X03495X/1 ]. Publisher Copyright: © 2023

PY - 2023/6/19

Y1 - 2023/6/19

N2 - This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.

AB - This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.

KW - Nanoelectromechanical systems

KW - Nonlinear resonance

KW - Mixing measurements

KW - Duffing oscillator equation

U2 - 10.1016/j.mne.2023.100212

DO - 10.1016/j.mne.2023.100212

M3 - Article (Academic Journal)

SN - 2590-0072

VL - 19

JO - Micro and Nano Engineering

JF - Micro and Nano Engineering

M1 - 100212

ER -

Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

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