Abstract
Incorporating GaN capping layers in conjunction with recessing has been identified as a means to maximize the high frequency performance of AlGaN/GaN high electron mobility transistors (HEMTs). Doping the cap heavily n-type is required in order to ensure minimal loss of carriers from the channel. Using a SiCl4/SF6 dry etch plasma recipe, 250 nm gate length HEMTs with recess lengths varying from 300 nm to 5 mu m are fabricated. Heavily doped n(+)GaN caps enabled contact resistances of 0.3 Omega mm to be achieved. Recessing using a SiCl4/SF6 recipe does not introduce significant numbers of bulk traps. Gate recessing in conjunction with Si3N4 passivation reduces rf dispersion to negligible levels.
Translated title of the contribution | Characterization of gate recessed GaN/AlGaN/GaN high electron mobility transistors fabricated using a SiCl4/SF6 dry etch recipe |
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Original language | English |
Pages (from-to) | 013711 |
Journal | Journal of Applied Physics |
Volume | 108 |
DOIs | |
Publication status | Published - Jul 2010 |