Combined infrared and Raman temperature measurements on device structures

A Sarua; H Ji; M Kuball; MJ Uren; T Martin; KP Hilton; RS Balmer

Combined infrared and Raman temperature measurements on device structures

A Sarua, H Ji, M Kuball, MJ Uren, T Martin, KP Hilton, RS Balmer

School of Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

8 Citations (Scopus)

Abstract

Combined Infrared and micro-Raman techniques were applied to measure temperature rise in semiconductor device structures based on AlGaN/GaN HFETs. Results from both techniques were compared and temperature and spatial resolution issues were discussed. Finite-difference 3D modeling of temperature distributions was performed to aid the interpretation of the experimental data. In addition the versatility of the Raman method was demonstrated for a GaAs pHEMT device

Translated title of the contribution	Combined infrared and Raman temperature measurements on device structures
Original language	English
Title of host publication	The International Conference on Compound Semiconductor Manufacturing Technology, Vancouver 2006
Publisher	CS Mantech
Pages	179 - 182
Number of pages	4
Publication status	Published - 2006

Bibliographical note

Conference Organiser: CS MANTECH

Structured keywords

CDTR

Cite this

@inproceedings{927dc8a72575402da94fe57be5a21030,

title = "Combined infrared and Raman temperature measurements on device structures",

abstract = "Combined Infrared and micro-Raman techniques were applied to measure temperature rise in semiconductor device structures based on AlGaN/GaN HFETs. Results from both techniques were compared and temperature and spatial resolution issues were discussed. Finite-difference 3D modeling of temperature distributions was performed to aid the interpretation of the experimental data. In addition the versatility of the Raman method was demonstrated for a GaAs pHEMT device",

author = "A Sarua and H Ji and M Kuball and MJ Uren and T Martin and KP Hilton and RS Balmer",

note = "Conference Organiser: CS MANTECH",

year = "2006",

language = "English",

pages = "179 -- 182",

booktitle = "The International Conference on Compound Semiconductor Manufacturing Technology, Vancouver 2006",

publisher = "CS Mantech",

}

Combined infrared and Raman temperature measurements on device structures. / Sarua, A; Ji, H; Kuball, M; Uren, MJ; Martin, T; Hilton, KP; Balmer, RS.

The International Conference on Compound Semiconductor Manufacturing Technology, Vancouver 2006. CS Mantech, 2006. p. 179 - 182.

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Combined infrared and Raman temperature measurements on device structures

AU - Sarua, A

AU - Ji, H

AU - Kuball, M

AU - Uren, MJ

AU - Martin, T

AU - Hilton, KP

AU - Balmer, RS

N1 - Conference Organiser: CS MANTECH

PY - 2006

Y1 - 2006

N2 - Combined Infrared and micro-Raman techniques were applied to measure temperature rise in semiconductor device structures based on AlGaN/GaN HFETs. Results from both techniques were compared and temperature and spatial resolution issues were discussed. Finite-difference 3D modeling of temperature distributions was performed to aid the interpretation of the experimental data. In addition the versatility of the Raman method was demonstrated for a GaAs pHEMT device

AB - Combined Infrared and micro-Raman techniques were applied to measure temperature rise in semiconductor device structures based on AlGaN/GaN HFETs. Results from both techniques were compared and temperature and spatial resolution issues were discussed. Finite-difference 3D modeling of temperature distributions was performed to aid the interpretation of the experimental data. In addition the versatility of the Raman method was demonstrated for a GaAs pHEMT device

M3 - Conference Contribution (Conference Proceeding)

SP - 179

EP - 182

BT - The International Conference on Compound Semiconductor Manufacturing Technology, Vancouver 2006

PB - CS Mantech

ER -

Combined infrared and Raman temperature measurements on device structures

Abstract

Bibliographical note

Structured keywords

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