Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H₂/Ar and H₂/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition

Edward J D Mahoney, Sohail Mushtaq, Michael N R Ashfold^*, Yuri A Mankelevich

^*Corresponding author for this work

Research output: Contribution to journal › Article (Academic Journal) › peer-review

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Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition