Comparative study between silicon-rich oxide films obtained by LPCVD and PECVD

A. Morales*, J. Barreto, C. Domínguez, M. Riera, M. Aceves, J. Carrillo

*Corresponding author for this work

Research output: Contribution to journalArticle (Academic Journal)peer-review

48 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Comparative study between silicon-rich oxide films obtained by LPCVD and PECVD'. Together they form a unique fingerprint.

Material Science

Physics

Chemical Engineering