Comparison of damage introduced into GaN/AlGaN/GaN heterostructures using selective dry etch recipes

R. T. Green, J. Luxmoore, P. A. Houston, F. Ranalli, T. Wang, P. J. Parbrook, MJ Uren, D. J. Wallis, T. Martin

Research output: Contribution to journalArticle (Academic Journal)peer-review

5 Citations (Scopus)

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