Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio miscrostructres using LIGA process

A Schneider, B Su, O Singleton, O Wilhelmi, SE Huq, PD Prewett, RA Laws

Research output: Contribution to journal › Article (Academic Journal) › peer-review

Translated title of the contribution	Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio miscrostructres using LIGA process
Original language	English
Pages (from-to)	88 - 92
Number of pages	5
Journal	Microsystem Technologies
Volume	8
Publication status	Published - 2002

Handle.net

@article{4e7a859ab2cb4b89b96b04287c0f8bc7,

title = "Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio miscrostructres using LIGA process",

author = "A Schneider and B Su and O Singleton and O Wilhelmi and SE Huq and PD Prewett and RA Laws",

year = "2002",

language = "English",

volume = "8",

pages = "88 -- 92",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Berlin Heidelberg",

}

TY - JOUR

T1 - Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio miscrostructres using LIGA process

AU - Schneider, A

AU - Su, B

AU - Singleton, O

AU - Wilhelmi, O

AU - Huq, SE

AU - Prewett, PD

AU - Laws, RA

PY - 2002

Y1 - 2002

M3 - Article (Academic Journal)

VL - 8

SP - 88

EP - 92

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

ER -