Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio miscrostructres using LIGA process

A Schneider, B Su, O Singleton, O Wilhelmi, SE Huq, PD Prewett, RA Laws

Research output: Contribution to journalArticle (Academic Journal)

Translated title of the contributionComparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio miscrostructres using LIGA process
Original languageEnglish
Pages (from-to)88 - 92
Number of pages5
JournalMicrosystem Technologies
Volume8
Publication statusPublished - 2002

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