Coupling length of silicon-on-insulator directional couplers probed by Fourier-space imaging

J. Jagerska, N. Le Thomas, R. Houdre, D. M. Beggs, D. O'Brien, T. F. Krauss

Research output: Contribution to journalArticle (Academic Journal)peer-review

5 Citations (Scopus)

Abstract

We use a Fourier-space imaging technique relying on outcoupling grating probes to study the coupled mode interaction and dispersion properties of guided modes in silicon-on-insulator codirectional couplers. Our approach allows us to measure the mode splitting inherent to coupled systems, determine the mode symmetry, and locally probe the coupling length with an accuracy of +/- 50 nm. A systematic study of directional couplers with different waveguide widths, coupling gaps, and e-beam exposure doses is reported in order to verify the results across a wider parameter space. (C) 2008 American Institute of Physics.
Original languageUndefined/Unknown
JournalApplied Physics Letters
Volume92
Issue number15
DOIs
Publication statusPublished - 14 Apr 2008

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