CVD diamond films produced in a parallel-plate RF reactor

PW May, MNR Ashfold, KN Rosser, NM Everitt

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	CVD diamond films produced in a parallel-plate RF reactor
Original language	English
Title of host publication	Proc. 3rd Int. Symp. Diamond Mater. (eds. J.P. Dismukes and K.V. Ravi)
Publisher	Electrochemical Society
Pages	448 - 454
Number of pages	6
Volume	93-17
Publication status	Published - 1993

Conference Proceedings/Title of Journal: Diamond Materials
Other: Electrochemical Society Proceedings

Handle.net

@inproceedings{c3326c45151a4f249bbf815cb878b2cc,

title = "CVD diamond films produced in a parallel-plate RF reactor",

author = "PW May and MNR Ashfold and KN Rosser and NM Everitt",

note = "Conference Proceedings/Title of Journal: Diamond Materials Other: Electrochemical Society Proceedings",

year = "1993",

language = "English",

volume = "93-17",

pages = "448 -- 454",

booktitle = "Proc. 3rd Int. Symp. Diamond Mater. (eds. J.P. Dismukes and K.V. Ravi)",

publisher = "Electrochemical Society",

}

TY - GEN

T1 - CVD diamond films produced in a parallel-plate RF reactor

AU - May, PW

AU - Ashfold, MNR

AU - Rosser, KN

AU - Everitt, NM

N1 - Conference Proceedings/Title of Journal: Diamond Materials Other: Electrochemical Society Proceedings

PY - 1993

Y1 - 1993

M3 - Conference Contribution (Conference Proceeding)

VL - 93-17

SP - 448

EP - 454

BT - Proc. 3rd Int. Symp. Diamond Mater. (eds. J.P. Dismukes and K.V. Ravi)

PB - Electrochemical Society

ER -