Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Paul W May; AM Malik; OJL Fox; Lucia Alianelli; AM Korsunsky; R Stevens; Ian M Loader; MC Wilson; I Pape; KJS Sawhney

doi:10.1088/0960-1317/23/12/125018

Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Paul W May, AM Malik, OJL Fox, Lucia Alianelli, AM Korsunsky, R Stevens, Ian M Loader, MC Wilson, I Pape, KJS Sawhney

Research output: Contribution to journal › Article (Academic Journal) › peer-review

8 Citations (Scopus)

Original language	English
Pages (from-to)	125018
Number of pages	7
Journal	Journal of Micromechanics and Microengineering
Volume	23
DOIs	https://doi.org/10.1088/0960-1317/23/12/125018
Publication status	Published - 2013

Keywords

CVD diamond
x-ray lens

Access to Document

10.1088/0960-1317/23/12/125018

2 Finished

Fabrication of high efficiency diamond lenses for X-rays.
May, P. W.
1/04/12 → 1/04/14
Project: Research
MOLECULAR BEAM MASS SPECTROMETRY OF MICROWAVE ACTIVATED PLASMAS
May, P. W.
1/09/06 → 1/09/10
Project: Research

Cite this

@article{3e4a8f3d4a9e4ef2918d19561e83f44f,

title = "Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses",

keywords = "CVD diamond, x-ray lens",

author = "May, {Paul W} and AM Malik and OJL Fox and Lucia Alianelli and AM Korsunsky and R Stevens and Loader, {Ian M} and MC Wilson and I Pape and KJS Sawhney",

year = "2013",

doi = "10.1088/0960-1317/23/12/125018",

language = "English",

volume = "23",

pages = "125018",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}

Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses. / May, Paul W; Malik, AM; Fox, OJL; Alianelli, Lucia; Korsunsky, AM; Stevens, R; Loader, Ian M; Wilson, MC; Pape, I; Sawhney, KJS.

In: Journal of Micromechanics and Microengineering, Vol. 23, 2013, p. 125018.

Research output: Contribution to journal › Article (Academic Journal) › peer-review

TY - JOUR

T1 - Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

AU - May, Paul W

AU - Malik, AM

AU - Fox, OJL

AU - Alianelli, Lucia

AU - Korsunsky, AM

AU - Stevens, R

AU - Loader, Ian M

AU - Wilson, MC

AU - Pape, I

AU - Sawhney, KJS

PY - 2013

Y1 - 2013

KW - CVD diamond

KW - x-ray lens

U2 - 10.1088/0960-1317/23/12/125018

DO - 10.1088/0960-1317/23/12/125018

M3 - Article (Academic Journal)

VL - 23

SP - 125018

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

ER -

Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Keywords

Access to Document

Projects

Fabrication of high efficiency diamond lenses for X-rays.

MOLECULAR BEAM MASS SPECTROMETRY OF MICROWAVE ACTIVATED PLASMAS

Cite this