Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Paul W May, AM Malik, OJL Fox, Lucia Alianelli, AM Korsunsky, R Stevens, Ian M Loader, MC Wilson, I Pape, KJS Sawhney

Research output: Contribution to journalArticle (Academic Journal)peer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)125018
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume23
DOIs
Publication statusPublished - 2013

Keywords

  • CVD diamond
  • x-ray lens

Cite this