Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Paul W May, AM Malik, OJL Fox, Lucia Alianelli, AM Korsunsky, R Stevens, Ian M Loader, MC Wilson, I Pape, KJS Sawhney

Research output: Contribution to journalArticle (Academic Journal)peer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)125018
Number of pages7
JournalJournal of Micromechanics and Microengineering
Publication statusPublished - 2013


  • CVD diamond
  • x-ray lens

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