Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures

PW May, JA Smith, YA Mankelevich

Research output: Contribution to journalArticle (Academic Journal)peer-review

80 Citations (Scopus)
Translated title of the contributionDeposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures
Original languageEnglish
Pages (from-to)345 - 352
Number of pages7
JournalDiamond and Related Materials
Volume15
DOIs
Publication statusPublished - Feb 2006

Bibliographical note

Publisher: Elsevier Science

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