Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures

Deposition of NCD films using hot filament CVD and Ar/CH₄/H₂ gas mixtures

Research output: Contribution to journal › Article (Academic Journal) › peer-review

88 Citations (Scopus)

Translated title of the contribution	Deposition of NCD films using hot filament CVD and Ar/CH₄/H₂ gas mixtures
Original language	English
Pages (from-to)	345 - 352
Number of pages	7
Journal	Diamond and Related Materials
Volume	15
DOIs	https://doi.org/10.1016/j.diamond.2005.06.044
Publication status	Published - Feb 2006

Publisher: Elsevier Science

@article{c55faf3ac613495badd00b0e951ccc0c,

title = "Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures",

author = "PW May and JA Smith and YA Mankelevich",

note = "Publisher: Elsevier Science",

year = "2006",

month = feb,

doi = "10.1016/j.diamond.2005.06.044",

language = "English",

volume = "15",

pages = "345 -- 352",

journal = "Diamond and Related Materials",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures

AU - May, PW

AU - Smith, JA

AU - Mankelevich, YA

N1 - Publisher: Elsevier Science

PY - 2006/2

Y1 - 2006/2

U2 - 10.1016/j.diamond.2005.06.044

DO - 10.1016/j.diamond.2005.06.044

M3 - Article (Academic Journal)

VL - 15

SP - 345

EP - 352

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -