Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Amir Farrokh Payam, Faezeh Arab Hassani, Morteza Fathipour

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

4 Citations (Scopus)

Abstract

This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

Original languageEnglish
Title of host publicationProceedings of the 19th International Conference on Microelectronics, ICM
Place of PublicationCairo, Egypt
Pages213-216
Number of pages4
DOIs
Publication statusPublished - 2007
Event19th International Conference on Microelectronics, ICM - Cairo, Egypt
Duration: 29 Dec 200731 Dec 2007

Publication series

NameProceedings of the International Conference on Microelectronics, ICM

Conference

Conference19th International Conference on Microelectronics, ICM
CountryEgypt
CityCairo
Period29/12/0731/12/07

Bibliographical note

Copyright:
Copyright 2009 Elsevier B.V., All rights reserved.

Keywords

  • Backstepping controller
  • Closed loop control
  • MEMS accelerometer
  • PID controller

Fingerprint Dive into the research topics of 'Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle'. Together they form a unique fingerprint.

Cite this