This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.
|Title of host publication||Proceedings of the 19th International Conference on Microelectronics, ICM|
|Place of Publication||Cairo, Egypt|
|Number of pages||4|
|Publication status||Published - 2007|
|Event||19th International Conference on Microelectronics, ICM - Cairo, Egypt|
Duration: 29 Dec 2007 → 31 Dec 2007
|Name||Proceedings of the International Conference on Microelectronics, ICM|
|Conference||19th International Conference on Microelectronics, ICM|
|Period||29/12/07 → 31/12/07|
Copyright 2009 Elsevier B.V., All rights reserved.
- Backstepping controller
- Closed loop control
- MEMS accelerometer
- PID controller