Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Amir Farrokh Payam; Faezeh Arab Hassani; Morteza Fathipour

doi:10.1109/ICM.2007.4497696

Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Amir Farrokh Payam
, Faezeh Arab Hassani
, Morteza Fathipour

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

5 Citations (Scopus)

Abstract

This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

Original language	English
Title of host publication	Proceedings of the 19th International Conference on Microelectronics, ICM
Place of Publication	Cairo, Egypt
Pages	213-216
Number of pages	4
DOIs	https://doi.org/10.1109/ICM.2007.4497696
Publication status	Published - 2007
Event	19th International Conference on Microelectronics, ICM - Cairo, Egypt Duration: 29 Dec 2007 → 31 Dec 2007

Publication series

Name	Proceedings of the International Conference on Microelectronics, ICM

Conference

Conference	19th International Conference on Microelectronics, ICM
Country/Territory	Egypt
City	Cairo
Period	29/12/07 → 31/12/07

Bibliographical note

Copyright:
Copyright 2009 Elsevier B.V., All rights reserved.

Research Groups and Themes

Photonics and Quantum

Keywords

Backstepping controller
Closed loop control
MEMS accelerometer
PID controller

Access to Document

10.1109/ICM.2007.4497696

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Cite this

Payam, A. F., Hassani, F. A., & Fathipour, M. (2007). Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle. In Proceedings of the 19th International Conference on Microelectronics, ICM (pp. 213-216). Article 4497696 (Proceedings of the International Conference on Microelectronics, ICM).. https://doi.org/10.1109/ICM.2007.4497696

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title = "Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle",

abstract = "This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.",

keywords = "Backstepping controller, Closed loop control, MEMS accelerometer, PID controller",

author = "Payam, \{Amir Farrokh\} and Hassani, \{Faezeh Arab\} and Morteza Fathipour",

year = "2007",

doi = "10.1109/ICM.2007.4497696",

language = "English",

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series = "Proceedings of the International Conference on Microelectronics, ICM",

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Payam, AF, Hassani, FA & Fathipour, M 2007, Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle. in Proceedings of the 19th International Conference on Microelectronics, ICM., 4497696, Proceedings of the International Conference on Microelectronics, ICM, Cairo, Egypt, pp. 213-216, 19th International Conference on Microelectronics, ICM, Cairo, Egypt, 29/12/07. https://doi.org/10.1109/ICM.2007.4497696

Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle. / Payam, Amir Farrokh; Hassani, Faezeh Arab; Fathipour, Morteza.
Proceedings of the 19th International Conference on Microelectronics, ICM. Cairo, Egypt, 2007. p. 213-216 4497696 (Proceedings of the International Conference on Microelectronics, ICM).

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

AU - Payam, Amir Farrokh

AU - Hassani, Faezeh Arab

AU - Fathipour, Morteza

PY - 2007

Y1 - 2007

N2 - This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

AB - This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

KW - Backstepping controller

KW - Closed loop control

KW - MEMS accelerometer

KW - PID controller

UR - https://www.scopus.com/pages/publications/51849122075

U2 - 10.1109/ICM.2007.4497696

DO - 10.1109/ICM.2007.4497696

M3 - Conference Contribution (Conference Proceeding)

AN - SCOPUS:51849122075

SN - 9781424418473

T3 - Proceedings of the International Conference on Microelectronics, ICM

SP - 213

EP - 216

BT - Proceedings of the 19th International Conference on Microelectronics, ICM

CY - Cairo, Egypt

T2 - 19th International Conference on Microelectronics, ICM

Y2 - 29 December 2007 through 31 December 2007

ER -

Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Abstract

Publication series

Conference

Bibliographical note

Research Groups and Themes

Keywords

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