Abstract
We report simple and low-cost setup based on a modified DVD optical pickup unit for detection and photothermal actuation of microcantilever oscillations. Small rectangular cantilevers (length 7 μm, width 3 μm and thickness 100 nm) were successfully actuated and detected in both air and liquid environments. Applications of such a setup for microcantilever-based biochemical and physical sensors and in atomic force microscopy are envisaged.
Original language | English |
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Pages (from-to) | 6-9 |
Number of pages | 4 |
Journal | Sensors and Actuators A: Physical |
Volume | 248 |
Early online date | 14 Jul 2016 |
DOIs | |
Publication status | Published - 1 Sept 2016 |
Keywords
- Micromechanical sensors
- Photothermal actuation
- Optical pickup