Development status of tunnel-current microe accelerometer

DF Moore, SC Burgess, J Daniel, H Klaubert, J Clarkson, N Shibaike, T Kiriyama

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionDevelopment status of tunnel-current microe accelerometer
Original languageEnglish
Title of host publication2nd International Workshop on Collaborative Design, Tokyo
Publication statusPublished - Jan 1996

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