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Development status of tunnel-current microe accelerometer

  • DF Moore
  • , SC Burgess
  • , J Daniel
  • , H Klaubert
  • , J Clarkson
  • , N Shibaike
  • , T Kiriyama

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionDevelopment status of tunnel-current microe accelerometer
Original languageEnglish
Title of host publication2nd International Workshop on Collaborative Design, Tokyo
Publication statusPublished - Jan 1996

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