Abstract
Carbon doped AlGaN/GaN power switching devices can show parasitic lateral leakage within the epitaxial layer. Here we demonstrate that lateral leakage occurs outside the active area of the device resulting in device-size-dependent back-gating effects and cross coupling to adjacent devices. This can result in time dependent changes in on-resistance in devices located more than a millimeter away from the active device. We also show that the lateral leakage path is highly non-ohmic, displaying an unusual oscillatory relaxation process.
| Original language | English |
|---|---|
| Publication status | Published - 1 Jan 2018 |
| Event | 2018 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2018 - Austin, United States Duration: 7 May 2018 → 10 May 2018 |
Conference
| Conference | 2018 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2018 |
|---|---|
| Country/Territory | United States |
| City | Austin |
| Period | 7/05/18 → 10/05/18 |
Keywords
- Carbon doping
- GaN HEMT
- Lateral leakage
- Substrate bias
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