Electrodeposition of Cu, Co and Ni on (100) n-Si

AA Pasa, ML Munford, MA Fiori, EM Boldo, FC Bizetto, RG Delatorre, O Zanchi, LFO Martins, ML Sartorelli, LS de Oliveira, L Seligman, W Schwarzacher

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionElectrodeposition of Cu, Co and Ni on (100) n-Si
Original languageEnglish
Title of host publicationProceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series
PublisherElectrochemical Society Inc
Pages221 - 230
Volume99
Publication statusPublished - 1999

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