Electrodeposition of Cu, Co and Ni on (100) n-Si

AA Pasa; ML Munford; MA Fiori; EM Boldo; FC Bizetto; RG Delatorre; O Zanchi; LFO Martins; ML Sartorelli; LS de Oliveira; L Seligman; W Schwarzacher

Electrodeposition of Cu, Co and Ni on (100) n-Si

AA Pasa
, ML Munford
, MA Fiori
, EM Boldo
, FC Bizetto
, RG Delatorre
, O Zanchi
, LFO Martins
, ML Sartorelli
, LS de Oliveira
, L Seligman
, W Schwarzacher

School of Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Electrodeposition of Cu, Co and Ni on (100) n-Si
Original language	English
Title of host publication	Proceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series
Publisher	Electrochemical Society Inc
Pages	221 - 230
Volume	99
Publication status	Published - 1999

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Pasa, AA., Munford, ML., Fiori, MA., Boldo, EM., Bizetto, FC., Delatorre, RG., Zanchi, O., Martins, LFO., Sartorelli, ML., de Oliveira, LS., Seligman, L., & Schwarzacher, W. (1999). Electrodeposition of Cu, Co and Ni on (100) n-Si. In Proceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series (Vol. 99, pp. 221 - 230). Electrochemical Society Inc.

@inproceedings{eb9500b9148f4fbea7794a48a2529e4d,

title = "Electrodeposition of Cu, Co and Ni on (100) n-Si",

author = "AA Pasa and ML Munford and MA Fiori and EM Boldo and FC Bizetto and RG Delatorre and O Zanchi and LFO Martins and ML Sartorelli and \{de Oliveira\}, LS and L Seligman and W Schwarzacher",

year = "1999",

language = "English",

volume = "99",

pages = "221 -- 230",

booktitle = "Proceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series",

publisher = "Electrochemical Society Inc",

}

Pasa, AA, Munford, ML, Fiori, MA, Boldo, EM, Bizetto, FC, Delatorre, RG, Zanchi, O, Martins, LFO, Sartorelli, ML, de Oliveira, LS, Seligman, L & Schwarzacher, W 1999, Electrodeposition of Cu, Co and Ni on (100) n-Si. in Proceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series. vol. 99, Electrochemical Society Inc, pp. 221 - 230.

Electrodeposition of Cu, Co and Ni on (100) n-Si. / Pasa, AA; Munford, ML; Fiori, MA et al.
Proceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series. Vol. 99 Electrochemical Society Inc, 1999. p. 221 - 230.

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Electrodeposition of Cu, Co and Ni on (100) n-Si

AU - Pasa, AA

AU - Munford, ML

AU - Fiori, MA

AU - Boldo, EM

AU - Bizetto, FC

AU - Delatorre, RG

AU - Zanchi, O

AU - Martins, LFO

AU - Sartorelli, ML

AU - de Oliveira, LS

AU - Seligman, L

AU - Schwarzacher, W

PY - 1999

Y1 - 1999

M3 - Conference Contribution (Conference Proceeding)

VL - 99

SP - 221

EP - 230

BT - Proceedings of Electrochemical Processing in ULSI fabrication and semiconductor/metal deposition II, Electrochem. Society Series

PB - Electrochemical Society Inc

ER -