Electromechanical design space exploration for electrostatically actuated ohmic switches using extended parallel plate compact model

Antonios Bazigos, Christopher L Ayala, Sunil Rana, Daniel Grogg, Montserrat Fernandez-Bolaños, Christoph Hagleitner, Tian Qin, Dinesh Pamunuwa, Adrian M Ionescu

Research output: Contribution to journalArticle (Academic Journal)peer-review


The nanoscaled electrostatically actuated electromechanical ohmic switch is an emerging device with advanced performance in terms of $I_ON/I_OFF$ ratio. It is imperative that compact models accompany such novel devices in order to fully evaluate their potential at the circuit-level. A minimal, yet, adequate compact model is developed and analyzed in this work. Further, the model is used as a compass for switch design space exploration and, simultaneously, a corresponding parameter extraction methodology is compiled. The application on data from numerical simulations and on measurements of fabricated devices, verifies the potential of the model, while circuit-level simulations validate its robustness within an industrial IC design environment.
Original languageUndefined/Unknown
Pages (from-to)93-100
Number of pages8
JournalSolid-State Electronics
Publication statusPublished - 2014

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