Electron Microscope and Spectroscopy System

JCC Day (Inventor), R Bennett (Inventor), A Bewick (Inventor)

Research output: Patent

Abstract

This invention relates to sample analysis systems. In a preferred embodiment an electron microscope is combined for example with a Raman, photoluminescence or cathodoluminescence spectroscopy system. This invention is embodied in the commercially available Renishaw SEMSCA SEM based Raman spectrometer.
Translated title of the contributionElectron Microscope and Spectroscopy System
Original languageEnglish
Patent number02753131.9-2217-GB0203599
Publication statusPublished - 5 Aug 2002

Bibliographical note

External Body: EPO

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