Abstract
This invention relates to sample analysis systems. In a preferred embodiment an electron microscope is combined for example with a Raman, photoluminescence or cathodoluminescence spectroscopy system.
This invention is embodied in the commercially available Renishaw SEMSCA SEM based Raman spectrometer.
Translated title of the contribution | Electron Microscope and Spectroscopy System |
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Original language | English |
Patent number | 02753131.9-2217-GB0203599 |
Publication status | Published - 5 Aug 2002 |