Electron Microscope and Spectroscopy System

JCC Day (Inventor), R Bennett (Inventor)

Research output: Patent


This invention relates to sample analysis systems e.g. an electron microscope and a spectroscopy system e.g. Raman spectroscopy. This invention is now embodied in the Renishaw SEMSCA instrument for performing Raman spectroscopy within an SEM
Translated title of the contributionElectron Microscope and Spectroscopy System
Original languageEnglish
Patent numberPCT/GB99/01395
Publication statusPublished - 5 May 1999

Bibliographical note

External Body: PCT
Other identifier: WO 99/58939
Other: UK patents 9809835.3 and 9809834.6


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