Abstract
This invention relates to sample analysis systems e.g. an electron microscope and a spectroscopy system e.g. Raman spectroscopy.
This invention is now embodied in the Renishaw SEMSCA instrument for performing Raman spectroscopy within an SEM
Translated title of the contribution | Electron Microscope and Spectroscopy System |
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Original language | English |
Patent number | PCT/GB99/01395 |
Publication status | Published - 5 May 1999 |
Bibliographical note
External Body: PCTOther identifier: WO 99/58939
Other: UK patents 9809835.3 and 9809834.6