Abstract
Room temperature electroreflectance (ER) spectroscopy has been used to study the fundamental properties of AlxInyGa1−x−yN/AlN/GaN heterostructures under different applied bias. The (0001)-oriented heterostructures were grown by metal-organic vapor phase epitaxy on sapphire. The band gap energy of the AlxInyGa1−x−yN layers has been determined from analysis of the ER spectra using Aspnes’ model. The obtained values are in good agreement with a nonlinear band gap interpolation equation proposed earlier. Bias-dependent ER allows one to determine the sheet carrier density of the two-dimensional electron gas and the barrier field strength.
Original language | English |
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Pages (from-to) | 085014 |
Number of pages | 6 |
Journal | Semiconductor Science and Technology |
Volume | 30 |
Issue number | 8 |
Publication status | Published - 1 Aug 2015 |
Keywords
- AlInGaN/GaN
- HEMT
- electroreflectance