Error mapping of high-speed AFM systems

Petr Klapetek; Loren Picco; Oliver Payton; Andrew Yacoot; Mervyn Miles

doi:10.1088/0957-0233/24/2/025006

Error mapping of high-speed AFM systems

Petr Klapetek^*, Loren Picco, Oliver Payton, Andrew Yacoot, Mervyn Miles

^*Corresponding author for this work

Research output: Contribution to journal › Article (Academic Journal) › peer-review

24 Citations (Scopus)

Abstract

In recent years, there have been several advances in the development of high-speed atomic force microscopes (HSAFMs) to obtain images with nanometre vertical and lateral resolution at frame rates in excess of 1 fps. To date, these instruments are lacking in metrology for their lateral scan axes; however, by imaging a series of two-dimensional lateral calibration standards, it has been possible to obtain information about the errors associated with these HSAFM scan axes. Results from initial measurements are presented in this paper and show that the scan speed needs to be taken into account when performing a calibration as it can lead to positioning errors of up to 3%.

Original language	English
Article number	025006
Number of pages	7
Journal	Measurement Science and Technology
Volume	24
Issue number	2
DOIs	https://doi.org/10.1088/0957-0233/24/2/025006
Publication status	Published - Feb 2013

Structured keywords

Engineering Mathematics Research Group

Keywords

high-speed atomic force microscopy
nanometrology
calibration
ATOMIC-FORCE MICROSCOPY

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10.1088/0957-0233/24/2/025006

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24 Citations
1 Article (Academic Journal)

Ionic solutions of two-dimensional materials
Cullen, P., Cox, K., Subhan, M., Picco, L., Payton, O., Buckley, D., Miller, T., Hodge, S., Skipper, N. T., Tileli, V. & Howard, C., Mar 2017, In: Nature Chemistry. 9, 3, p. 244–249 6 p.
Research output: Contribution to journal › Article (Academic Journal) › peer-review

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64 Citations (Scopus)

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2 Finished

GUIDED ACCESS TO HIGH-SPEED CONTACT ATOMIC FORCE MICROSCOPY AND PHOTONIC FORCE MICROSCOPY AT THE NANOSCIENCE AND QUANTUM INFORMATION CENTRE
Hoerber, J. K. H.
1/01/09 → 1/07/13
Project: Research
ULTRA HIGH SPEEDS NON-CONTACT FORCE MICROSCOPY
Miles, M. J.
1/10/04 → 1/10/09
Project: Research

Cite this

@article{21504e7a1c5c437b9f2ff5005017a83c,

title = "Error mapping of high-speed AFM systems",

abstract = "In recent years, there have been several advances in the development of high-speed atomic force microscopes (HSAFMs) to obtain images with nanometre vertical and lateral resolution at frame rates in excess of 1 fps. To date, these instruments are lacking in metrology for their lateral scan axes; however, by imaging a series of two-dimensional lateral calibration standards, it has been possible to obtain information about the errors associated with these HSAFM scan axes. Results from initial measurements are presented in this paper and show that the scan speed needs to be taken into account when performing a calibration as it can lead to positioning errors of up to 3%.",

keywords = "high-speed atomic force microscopy, nanometrology, calibration, ATOMIC-FORCE MICROSCOPY",

author = "Petr Klapetek and Loren Picco and Oliver Payton and Andrew Yacoot and Mervyn Miles",

year = "2013",

month = feb,

doi = "10.1088/0957-0233/24/2/025006",

language = "English",

volume = "24",

journal = "Measurement Science and Technology",

issn = "0957-0233",

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TY - JOUR

T1 - Error mapping of high-speed AFM systems

AU - Klapetek, Petr

AU - Picco, Loren

AU - Payton, Oliver

AU - Yacoot, Andrew

AU - Miles, Mervyn

PY - 2013/2

Y1 - 2013/2

N2 - In recent years, there have been several advances in the development of high-speed atomic force microscopes (HSAFMs) to obtain images with nanometre vertical and lateral resolution at frame rates in excess of 1 fps. To date, these instruments are lacking in metrology for their lateral scan axes; however, by imaging a series of two-dimensional lateral calibration standards, it has been possible to obtain information about the errors associated with these HSAFM scan axes. Results from initial measurements are presented in this paper and show that the scan speed needs to be taken into account when performing a calibration as it can lead to positioning errors of up to 3%.

AB - In recent years, there have been several advances in the development of high-speed atomic force microscopes (HSAFMs) to obtain images with nanometre vertical and lateral resolution at frame rates in excess of 1 fps. To date, these instruments are lacking in metrology for their lateral scan axes; however, by imaging a series of two-dimensional lateral calibration standards, it has been possible to obtain information about the errors associated with these HSAFM scan axes. Results from initial measurements are presented in this paper and show that the scan speed needs to be taken into account when performing a calibration as it can lead to positioning errors of up to 3%.

KW - high-speed atomic force microscopy

KW - nanometrology

KW - calibration

KW - ATOMIC-FORCE MICROSCOPY

U2 - 10.1088/0957-0233/24/2/025006

DO - 10.1088/0957-0233/24/2/025006

M3 - Article (Academic Journal)

SN - 0957-0233

VL - 24

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 2

M1 - 025006

ER -

Error mapping of high-speed AFM systems

Abstract

Structured keywords

Keywords

Access to Document

Handle.net

Fingerprint

Research output

Ionic solutions of two-dimensional materials

Projects

GUIDED ACCESS TO HIGH-SPEED CONTACT ATOMIC FORCE MICROSCOPY AND PHOTONIC FORCE MICROSCOPY AT THE NANOSCIENCE AND QUANTUM INFORMATION CENTRE

ULTRA HIGH SPEEDS NON-CONTACT FORCE MICROSCOPY

Cite this