Error mapping of high-speed AFM systems

Petr Klapetek*, Loren Picco, Oliver Payton, Andrew Yacoot, Mervyn Miles

*Corresponding author for this work

Research output: Contribution to journalArticle (Academic Journal)peer-review

21 Citations (Scopus)

Abstract

In recent years, there have been several advances in the development of high-speed atomic force microscopes (HSAFMs) to obtain images with nanometre vertical and lateral resolution at frame rates in excess of 1 fps. To date, these instruments are lacking in metrology for their lateral scan axes; however, by imaging a series of two-dimensional lateral calibration standards, it has been possible to obtain information about the errors associated with these HSAFM scan axes. Results from initial measurements are presented in this paper and show that the scan speed needs to be taken into account when performing a calibration as it can lead to positioning errors of up to 3%.

Original languageEnglish
Article number025006
Number of pages7
JournalMeasurement Science and Technology
Volume24
Issue number2
DOIs
Publication statusPublished - Feb 2013

Keywords

  • high-speed atomic force microscopy
  • nanometrology
  • calibration
  • ATOMIC-FORCE MICROSCOPY

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