Experiment and modeling of the deposition of ultrananocrystalline diamond films using hot filament chemical vapor deposition and Ar/CH4/H2 gas mixtures: A generalized mechanism for ultrananocrystalline diamond growth

PW May, YA Mankelevich

Research output: Contribution to journalArticle (Academic Journal)peer-review

55 Citations (Scopus)
Translated title of the contributionExperiment and modeling of the deposition of ultrananocrystalline diamond films using hot filament chemical vapor deposition and Ar/CH4/H2 gas mixtures: A generalized mechanism for ultrananocrystalline diamond growth
Original languageEnglish
Pages (from-to)024301:1 - 024301:9
Number of pages9
JournalJournal of Applied Physics
Volume100
DOIs
Publication statusPublished - Jul 2006

Bibliographical note

Publisher: American Institute of Physics

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