@article{6445e1a298a34b5ea35d411e3ff764d7,
title = "Experiment and modeling of the deposition of ultrananocrystalline diamond films using hot filament chemical vapor deposition and Ar/CH4/H2 gas mixtures: A generalized mechanism for ultrananocrystalline diamond growth",
author = "PW May and YA Mankelevich",
note = "Publisher: American Institute of Physics",
year = "2006",
month = jul,
doi = "10.1063/1.2214304",
language = "English",
volume = "100",
pages = "024301:1 -- 024301:9",
journal = "Journal of Applied Physics",
issn = "1089-7550",
publisher = "American Institute of Physics (AIP)",
}