Experimental data vs 3-D model calculations of HFCVD processes: Correlations and discrepancies

YA Mankelevich, NV Suetin, MNR Ashfold, JA Smith, E Cameron

Research output: Contribution to journal › Article (Academic Journal) › peer-review

31 Citations (Scopus)

Translated title of the contribution	Experimental data vs 3-D model calculations of HFCVD processes: Correlations and discrepancies
Original language	English
Pages (from-to)	364 - 369
Journal	Diamond Rel. Mater
Volume	10
Publication status	Published - 2001

Handle.net

@article{088bd7e2de0a4798b3b0121a3c49f120,

title = "Experimental data vs 3-D model calculations of HFCVD processes: Correlations and discrepancies",

author = "YA Mankelevich and NV Suetin and MNR Ashfold and JA Smith and E Cameron",

year = "2001",

language = "English",

volume = "10",

pages = "364 -- 369",

journal = "Diamond Rel. Mater",

publisher = "Elsevier",

}