Experimental data vs 3-D model calculations of HFCVD processes: Correlations and discrepancies

YA Mankelevich, NV Suetin, MNR Ashfold, JA Smith, E Cameron

Research output: Contribution to journalArticle (Academic Journal)peer-review

30 Citations (Scopus)
Translated title of the contributionExperimental data vs 3-D model calculations of HFCVD processes: Correlations and discrepancies
Original languageEnglish
Pages (from-to)364 - 369
JournalDiamond Rel. Mater
Volume10
Publication statusPublished - 2001

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