| Translated title of the contribution | Experimental data vs 3-D model calculations of HFCVD processes: Correlations and discrepancies |
|---|---|
| Original language | English |
| Pages (from-to) | 364 - 369 |
| Journal | Diamond Rel. Mater |
| Volume | 10 |
| Publication status | Published - 2001 |
Research Groups and Themes
- Physical & Theoretical