Experimental measurements and theoretical predictions of the thermal hydraulic performance of clean rooms for the semi conductor industry

GL Quarini, YC Chang

Research output: Contribution to journal › Article (Academic Journal) › peer-review

Translated title of the contribution	Experimental measurements and theoretical predictions of the thermal hydraulic performance of clean rooms for the semi conductor industry
Original language	English
Pages (from-to)	9 - 18
Journal	Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering
Volume	210
Publication status	Published - 1996

Publisher: IMechE

Handle.net

@article{d38a02c081a34c4583df8a5ff142f62d,

title = "Experimental measurements and theoretical predictions of the thermal hydraulic performance of clean rooms for the semi conductor industry",

author = "GL Quarini and YC Chang",

note = "Publisher: IMechE",

year = "1996",

language = "English",

volume = "210",

pages = "9 -- 18",

journal = "Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering",

issn = "0954-4089",

publisher = "SAGE Publications Ltd",

}

Research output: Contribution to journal › Article (Academic Journal) › peer-review

TY - JOUR

T1 - Experimental measurements and theoretical predictions of the thermal hydraulic performance of clean rooms for the semi conductor industry

AU - Quarini, GL

AU - Chang, YC

N1 - Publisher: IMechE

PY - 1996

Y1 - 1996

M3 - Article (Academic Journal)

SN - 0954-4089

VL - 210

SP - 9

EP - 18

JO - Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering

JF - Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering

ER -