Experimental measurements and theoretical predictions of the thermal hydraulic performance of clean rooms for the semi conductor industry

GL Quarini, YC Chang

Research output: Contribution to journalArticle (Academic Journal)

Translated title of the contributionExperimental measurements and theoretical predictions of the thermal hydraulic performance of clean rooms for the semi conductor industry
Original languageEnglish
Pages (from-to)9 - 18
JournalProceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering
Volume210
Publication statusPublished - 1996

Bibliographical note

Publisher: IMechE

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