Fabrication of 1D photonic crystal structures on proton-exchanged LiNbO3 ridge waveguides based on FIB and ICP etching

Z Ren, PJ Heard, S Yu

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Original languageEnglish
Title of host publicationNanoFIB, Manchester, UK
Publication statusPublished - 2007

Bibliographical note

Conference Organiser: Royal Microscopical Society

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