Fabrication of 1D photonic crystal structures on proton-exchanged LiNbO3 ridge waveguides based on FIB and ICP etching

Z Ren, PJ Heard, S Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Fabrication of 1D photonic crystal structures on proton-exchanged LiNbO3 ridge waveguides based on FIB and ICP etching
Original language	English
Title of host publication	NanoFIB, Manchester, UK
Publication status	Published - 2007

Conference Organiser: Royal Microscopical Society

Handle.net

@inproceedings{445e935150be4d40ae7009f4bb9af1d6,

title = "Fabrication of 1D photonic crystal structures on proton-exchanged LiNbO3 ridge waveguides based on FIB and ICP etching",

author = "Z Ren and PJ Heard and S Yu",

note = "Conference Organiser: Royal Microscopical Society",

year = "2007",

language = "English",

booktitle = "NanoFIB, Manchester, UK",

}