Fabrication of a GaN directional coupler using FIB etching

E Engin, PJ Heard, T Wang, JL O'Brien, MJ Cryan

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Fabrication of a GaN directional coupler using FIB etching
Original language	English
Title of host publication	2nd International Workshop on FIB for Photonics, Cambridge, UK
Publication status	Published - Apr 2010

Conference Organiser: IEEE

Cite this

@inproceedings{01bffa9a8fde45a5adc8671b95a7bcdd,

title = "Fabrication of a GaN directional coupler using FIB etching",

author = "E Engin and PJ Heard and T Wang and JL O'Brien and MJ Cryan",

note = "Conference Organiser: IEEE",

year = "2010",

month = apr,

language = "English",

booktitle = "2nd International Workshop on FIB for Photonics, Cambridge, UK",

}