Fabriction of 3D waveguides by induction coupled plasma etching on LiNbO3/LiTaO3 single crystal film by liquid phase epitaxy growth

Z Ren, S Yu, J Marshall, D Walker, PA Thomas

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Fabriction of 3D waveguides by induction coupled plasma etching on LiNbO3/LiTaO3 single crystal film by liquid phase epitaxy growth
Original language	English
Title of host publication	SPIE Asia-Pacific Optical Communication conference (APOC), Wuhan, China
Publication status	Published - 31 Oct 2007

Handle.net

@inproceedings{debebbae0530455eb85f453934fc3265,

title = "Fabriction of 3D waveguides by induction coupled plasma etching on LiNbO3/LiTaO3 single crystal film by liquid phase epitaxy growth",

author = "Z Ren and S Yu and J Marshall and D Walker and PA Thomas",

year = "2007",

month = oct,

day = "31",

language = "English",

booktitle = "SPIE Asia-Pacific Optical Communication conference (APOC), Wuhan, China",

}

TY - GEN

T1 - Fabriction of 3D waveguides by induction coupled plasma etching on LiNbO3/LiTaO3 single crystal film by liquid phase epitaxy growth

AU - Ren, Z

AU - Yu, S

AU - Marshall, J

AU - Walker, D

AU - Thomas, PA

PY - 2007/10/31

Y1 - 2007/10/31

M3 - Conference Contribution (Conference Proceeding)

BT - SPIE Asia-Pacific Optical Communication conference (APOC), Wuhan, China

ER -